Hach Ultra Brands

Vacuum Particle Monitors

		HYT 20SXG/25SXG Probe Sensors
	Vacuum Particle Sensors
	High power laser diode for 0.19 micron sensitivity and large detection area 20SXG: Ultra compact probe design for installation in restricted spaces 25SXG: Mount directly within a chamber or process module for in-chamber monitoring

		HYT 70XE
	Vacuum Particle Sensor
	Specifically designed for in situ particle monitoring (ISPM) Use with an HYT controller Integrate into large pump line configurations.

		HYT 9020 Series Plasma Particle Detector
	Vacuum Particle Sensor
	Suited to high-vacuum processes Unique, reliable solutions for managing particle contamination and improving yield Above-wafer and above-turbo applications available for implant and etch equipment

		HYT PM-250 Series
	Vacuum Particle Controller
	Interface between sensors and data acquisition systems Support real-time particle monitoring tasks Machine Trigger capability synchronizes particle data collection with semiconductor production process cycle

		HYT PM-450
	Vacuum Particle Controller
	Interface between sensors and data acquisition systems Support real-time particle monitoring tasks Uses Sensor Bus and web server technology

	Process Instruments

Press Releases

ORBISPHERE 510 Portable

New Quick and Easy Total Packaged Beer Measurement

ORBISPHERE A1100

Just Simply Accurate

POLYMETRON 9240

Multi-Channel Sodium Monitoring

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