Process vacuum environments

Hach Ultra HYT products have led the industry in in situ particle monitoring (ispm) for almost 20 years. From the early days of pioneering the field, the HYT range of in in situ particle sensors for Etch, Implant and CVD tools have matured to truly outstanding vacuum process monitoring solutions. All over the world, semiconductor manufacturing relies upon the unsurpassed performance, reliability and continual innovation of HYT solutions.

Products
HYT 9020 Series Plasma Particle Detector
Vacuum Particle Sensor
  • Suited to high-vacuum processes
  • Unique, reliable solutions for managing particle contamination and improving yield
  • Above-wafer and above-turbo applications available for implant and etch equipment
HYT 20SXG/25SXG Probe Sensors
Vacuum Particle Sensors
  • High power laser diode for 0.19 micron sensitivity and large detection area
  • 20SXG: Ultra compact probe design for installation in restricted spaces
  • 25SXG: Mount directly within a chamber or process module for in-chamber monitoring
HYT 70XE HYT 70XE
Vacuum Particle Sensor
  • Specifically designed for in situ particle monitoring (ISPM)
  • Use with an HYT controller
  • Integrate into large pump line configurations.
HYT PM-250 Series
Vacuum Particle Controller
  • Interface between sensors and data acquisition systems
  • Support real-time particle monitoring tasks
  • Machine Trigger capability synchronizes particle data collection with semiconductor production process cycle
HYT PM450 HYT PM-450
Vacuum Particle Controller
  • Interface between sensors and data acquisition systems
  • Support real-time particle monitoring tasks
  • Uses Sensor Bus and web server technology
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