HIAC ChemShield

Containment System

Protects MicroCount series sensors from environmental degradation, enabling online monitoring of Wet Chemical Process Stations, Chemical Distribution Systems, and High Purity Parts Cleaning Systems.

Detect process-related issues at the onset of the problem, such as:

  • Non-conformal device etching
  • Incomplete photoresist stripping
  • Partial bath recovery
Product Information
pdf HIAC Chemshield Datasheet
 
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